References(114)
[1]
Hariharan, P. Basics of Interferometry; Elsevier: Amsterdam, 2010.
[2]
Vargas, J.; Quiroga, J. A.; Belenguer, T. Phase-shifting interferometry based on principal component analysis. Opt. Lett. 2011, 36, 1326-1328.
[3]
Yashiro, W.; Takeda, Y.; Momose, A. Efficiency of capturing a phase image using cone-beam X-ray Talbot interferometry. J. Opt. Soc. Am. A 2008, 25, 2025-2039.
[4]
Wyrowski, F. Diffractive optical elements: Iterative calculation of quantized, blazed phase structures. J. Opt. Soc. Am. A 1990, 7, 961-969.
[5]
Antoniades, M. A.; Eleftheriades, G. V. A broadband series power divider using zero-degree metamaterial phase-shifting lines. IEEE Microw. Wirel. Compon. Lett. 2005, 15, 808-810.
[6]
Dolling, G.; Enkrich, C.; Wegener, M.; Soukoulis, C. M.; Linden, S. Simultaneous negative phase and group velocity of light in a metamaterial. Science 2006, 312, 892-894.
[7]
Larouche, S.; Tsai, Y. J.; Tyler, T.; Jokerst, N. M.; Smith, D. R. Infrared metamaterial phase holograms. Nat. Mater. 2012, 11, 450-454.
[8]
Zhu, R.; Liu, X. N.; Hu, G. K.; Sun, C. T.; Huang, G. L. Negative refraction of elastic waves at the deep-subwavelength scale in a single-phase metamaterial. Nat. Commun. 2014, 5, 5510.
[9]
Campbell, M.; Sharp, D. N.; Harrison, M. T.; Denning, R. G.; Turberfield, A. J. Fabrication of photonic crystals for the visible spectrum by holographic lithography. Nature 2000, 404, 53-56.
[10]
Liebmann, L. W.; Bukofsky, S. J.; Graur, I. Generating mask patterns for alternating phase-shift mask lithography. U.S. Patent 7475380, January 6, 2009.
[11]
Perlitz, S.; Buttgereit, U.; Scherübl, T.; Seidel, D.; Lee, K. M.; Tavassoli, M. Novel solution for in-die phase control under scanner equivalent optical settings for 45-nm node and below. In Proceedings of SPIE 6607, Photomask and Next-Generation Lithography Mask Technology XIV, Yokohama, Japan, 2007, p 66070Z.
[12]
Tritchkov, A.; Jeong, S.; Kenyon, C. Lithography enabling for the 65 nm node gate layer patterning with alternating PSM. In Proceedings of SPIE 6607, Optical Microlithography XVIII, San Jose, California, USA, 2005, pp 215-225.
[13]
Levenson, M. D.; Viswanathan, N. S.; Simpson, R. A. Improving resolution in photolithography with a phase-shifting mask. IEEE Trans. Electron Devices 1982, 29, 1828-1836.
[14]
Wong, A. K. K. Resolution Enhancement Techniques in Optical Lithography; SPIE Press: Bellingham, 2001.
[15]
Weichelt, T.; Vogler, U.; Stuerzebecher, L.; Voelkel, R.; Zeitner, U. D. Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks. Opt. Express 2014, 22, 16310-16321.
[16]
Odom, T. W.; Love, J. C.; Wolfe, D. B.; Paul, K. E.; Whitesides, G. M. Improved pattern transfer in soft lithography using composite stamps. Langmuir 2002, 18, 5314-5320.
[17]
Xia, Y. N.; Whitesides, G. M. Soft lithography. Annu. Rev. Mater. Sci. 1998, 28, 153-184.
[18]
Qin, D.; Xia, Y. N.; Whitesides, G. M. Soft lithography for micro- and nanoscale patterning. Nat. Protoc. 2010, 5, 491-502.
[19]
Jeon, S.; Menard, E.; Park, J. U.; Maria, J.; Meitl, M.; Zaumseil, J.; Rogers, J. A. Three-dimensional nanofabrication with rubber stamps and conformable photomasks. Adv. Mater. 2004, 16, 1369-1373.
[20]
Rogers, J. A.; Paul, K. E.; Jackman, R. J.; Whitesides, G. M. Generating ~ 90 nanometer features using near-field contact-mode photolithography with an elastomeric phase mask. J. Vac. Sci. Technol. B 1998, 16, 59-68.
[21]
Rogers, J. A.; Paul, K. E.; Jackman, R. J.; Whitesides, G. M. Using an elastomeric phase mask for sub-100 nm photolithography in the optical near field. Appl. Phys. Lett. 1997, 70, 2658-2660.
[22]
Aizenberg, J.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M. Imaging profiles of light intensity in the near field: Applications to phase-shift photolithography. Appl. Opt. 1998, 37, 2145-2152.
[23]
Maria, J.; Jeon, S.; Rogers, J. A. Nanopatterning with conformable phase masks. J. Photochem. Photobiol. A 2004, 166, 149-154.
[24]
Aizenberg, J.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M. Imaging the irradiance distribution in the optical near field. Appl. Phys. Lett. 1997, 71, 3773-3775.
[25]
Wang, F.; Horn, M. W.; Lakhtakia, A. Rigorous electromagnetic modeling of near-field phase-shifting contact lithography. Microelectron. Eng. 2004, 71, 34-53.
[26]
Li, Z. Y.; Yin, Y. D.; Xia, Y. N. Optimization of elastomeric phase masks for near-field photolithography. Appl. Phys. Lett. 2001, 78, 2431-2433.
[27]
Jeon, S.; Park, J. U.; Cirelli, R.; Yang, S.; Heitzman, C. E.; Braun, P. V.; Kenis, P. J. A.; Rogers, J. A. Fabricating complex three-dimensional nanostructures with high-resolution conformable phase masks. Proc. Natl. Acad. Sci. USA 2004, 101, 12428-12433.
[28]
Shir, D. J.; Jeon, S.; Liao, H. W.; Highland, M.; Cahill, D. G.; Su, M. F.; El-Kady, I. F.; Christodoulou, C. G.; Bogart, G. R.; Hamza, A. V. et al. Three-dimensional nanofabrication with elastomeric phase masks. J. Phys. Chem. B 2007, 111, 12945-12958.
[29]
Park, J. Y.; Jeon, S. W. Large-Area, Three-dimensional nanopatterning with conformal phase masks. Polym. Sci. Technol. 2013, 24, 517-527.
[30]
Ahn, C.; Park, J.; Cho, D.; Hyun, G.; Ham, Y.; Kim, K.; Nam, S. H.; Bae, G.; Lee, K.; Shim, Y. S. et al. High-performance functional nanocomposites using 3D ordered and continuous nanostructures generated from proximity-field nanopatterning. Funct. Compos. Struct. 2019, 1, 032002.
[31]
Hua, F.; Sun, Y. G.; Gaur, A.; Meitl, M. A.; Bilhaut, L.; Rotkina, L.; Wang, J. F.; Geil, P.; Shim, M.; Rogers, J. A. et al. Polymer imprint lithography with molecular-scale resolution. Nano Lett. 2004, 4, 2467-2471.
[32]
Zhang, J.; Tan, K. L.; Gong, H. Q. Characterization of the polymerization of SU-8 photoresist and its applications in micro-electro-mechanical systems (MEMS). Polym. Test. 2001, 20, 693-701.
[33]
Lin, C. H.; Lee, G. B.; Chang, B. W.; Chang, G. L. A new fabrication process for ultra-thick microfluidic microstructures utilizing SU-8 photoresist. J. Micromech. Microeng. 2002, 12, 590.
[34]
Conradie, E. H.; Moore, D. F. SU-8 thick photoresist processing as a functional material for MEMS applications. J. Micromech. Microeng. 2002, 12, 368.
[35]
Rayleigh, L. XXV. On copying diffraction-gratings, and on some phenomena connected therewith. London Edinburgh Dublin Philos. Mag. J. Sci. 1881, 11, 196-205.
[36]
Talbot, H. F. LXXVI. Facts relating to optical science. No. IV. London Edinburgh Dublin Philos. Mag. J. Sci. 1836, 9, 401-407.
[37]
Sato, T. Talbot effect immersion lithography by self-imaging of very fine grating patterns. J. Vac. Sci. Technol. B 2012, 30, 06FG02.
[38]
Wen, J. M.; Zhang, Y.; Xiao, M. The Talbot effect: Recent advances in classical optics, nonlinear optics, and quantum optics. Adv. Opt. Photonics 2013, 5, 83-130.
[39]
Park, J.; Kim, K. I.; Kim, K.; Kim, D. C.; Cho, D.; Lee, J. H.; Jeon, S. Rapid, high-resolution 3D interference printing of multilevel ultralong nanochannel arrays for high-throughput nanofluidic transport. Adv. Mater. 2015, 27, 8000-8006.
[40]
Park, J.; Wang, S. D.; Li, M.; Ahn, C.; Hyun, J. K.; Kim, D. S.; Kim, D. K.; Rogers, J. A.; Huang, Y. G.; Jeon, S. Three-dimensional nanonetworks for giant stretchability in dielectrics and conductors. Nat. Commun. 2012, 3, 916.
[41]
Hyun, J. K.; Park, J.; Kim, E.; Lauhon, L. J.; Jeon, S. Rational control of diffraction and interference from conformal phase gratings: Toward high-resolution 3D nanopatterning. Adv. Opt. Mater. 2014, 2, 1213-1220.
[42]
Shir, D.; Liao, H. W.; Jeon, S.; Xiao, D.; Johnson, H. T.; Bogart, G. R.; Bogart, K. H. A.; Rogers, J. A. Three-dimensional nanostructures formed by single step, two-photon exposures through elastomeric Penrose quasicrystal phase masks. Nano Lett. 2008, 8, 2236-2244.
[43]
Nam, S. H.; Park, J.; Jeon, S. Rapid and large-scale fabrication of full color woodpile photonic crystals via interference from a conformal multilevel phase mask. Adv. Funct. Mater. 2019, 29, 1904971.
[44]
Jeon, S.; Malyarchuk, V.; Rogers, J. A.; Wiederrecht, G. P. Fabricating three dimensional nanostructures using two photon lithography in a single exposure step. Opt. Express 2006, 14, 2300-2308.
[45]
Jeon, S.; Shir, D. J.; Nam, Y. S.; Nidetz, R.; Highland, M.; Cahill, D. G.; Rogers, J. A.; Su, M. F.; El-Kady, I. F.; Christodoulou, C. G. et al. Molded transparent photopolymers and phase shift optics for fabricating three dimensional nanostructures. Opt. Express 2007, 15, 6358-6366.
[46]
Park, J.; Park, J. H.; Kim, E.; Ahn, C. W.; Jang, H. I.; Rogers, J. A.; Jeon, S. Conformable solid-index phase masks composed of high-aspect-ratio micropillar arrays and their application to 3D Nanopatterning. Adv. Mater. 2011, 23, 860-864.
[47]
del Campo, A.; Greiner, C. SU-8: A photoresist for high-aspect-ratio and 3D submicron lithography. J. Micromech. Microeng. 2007, 17, R81.
[48]
Lee, J. B.; Choi, K. H.; Yoo, K. Innovative SU-8 lithography techniques and their applications. Micromachines 2015, 6, 1-18.
[49]
Moon, J. H.; Yang, S. Chemical aspects of three-dimensional photonic crystals. Chem. Rev. 2010, 110, 547-574.
[50]
Moon, J. H.; Yang, S. Creating three-dimensional polymeric microstructures by multi-beam interference lithography. J. Macromol. Sci. Part C 2005, 45, 351-373.
[51]
Moon, J. H.; Ford, J.; Yang, S. Fabricating three-dimensional polymeric photonic structures by multi-beam interference lithography. Polym. Adv. Technol. 2006, 17, 83-93.
[52]
Hayek, A.; Xu, Y. A.; Okada, T.; Barlow, S.; Zhu, X. L.; Moon, J. H.; Marder, S. R.; Yang, S. Poly(glycidyl methacrylate)s with controlled molecular weights as low-shrinkage resins for 3D multibeam interference lithography. J. Mater. Chem. 2008, 18, 3316-3318.
[53]
Cho, D.; Park, J.; Kim, J.; Kim, T.; Kim, J.; Park, I.; Jeon, S. Three-dimensional continuous conductive nanostructure for highly sensitive and stretchable strain sensor. ACS Appl. Mater. Interfaces 2017, 9, 17369-17378.
[54]
Jang, J. H.; Jhaveri, S. J.; Rasin, B.; Koh, C. Y.; Ober, C. K.; Thomas, E. L. Three-dimensionally-patterned submicrometer-scale hydrogel/air networks that offer a new platform for biomedical applications. Nano Lett. 2008, 8, 1456-1460.
[55]
Jang, J. H.; Dendukuri, D.; Hatton, T. A.; Thomas, E. L.; Doyle, P. S. A route to three-dimensional structures in a microfluidic device: Stop-flow interference lithography. Angew. Chem., Int. Ed. 2007, 119, 9185-9189.
[56]
Moon, J. H.; Seo, J. S.; Xu, Y. A.; Yang, S. Direct fabrication of 3D silica-like microstructures from epoxy-functionalized polyhedral oligomeric silsesquioxane (POSS). J. Mater. Chem. 2009, 19, 4687-4691.
[57]
George, M. C.; Nelson, E. C.; Rogers, J. A.; Braun, P. V. Direct fabrication of 3D periodic inorganic microstructures using conformal phase masks. Angew. Chem., Int. Ed. 2008, 121, 150-154.
[58]
Park, J.; Seo, J.; Jung, H. K.; Hyun, G.; Park, S. Y.; Jeon, S. Direct optical fabrication of fluorescent, multilevel 3D nanostructures for highly efficient chemosensing platforms. Adv. Funct. Mater. 2016, 26, 7170-7177.
[59]
Ahn, C.; Park, J.; Kim, D.; Jeon, S. Monolithic 3D titania with ultrathin nanoshell structures for enhanced photocatalytic activity and recyclability. Nanoscale 2013, 5, 10384-10389.
[60]
Hyun, G.; Song, J. T.; Ahn, C.; Ham, Y.; Cho, D.; Oh, J.; Jeon, S. Hierarchically porous Au nanostructures with interconnected channels for efficient mass transport in electrocatalytic CO2 reduction. Proc. Natl. Acad. Sci. USA 2020, 117, 5680-5685.
[61]
Ahn, J.; Ahn, C.; Jeon, S.; Park, J. Atomic layer deposition of inorganic thin films on 3D polymer nanonetworks. Appl. Sci. 2019, 9, 1990.
[62]
Ahn, J.; Hong, S.; Shim, Y. S.; Park, J. Electroplated functional materials with 3D nanostructures defined by advanced optical lithography and their emerging applications. Appl. Sci. 2020, 10, 8780.
[63]
Novak, T. G.; Kim, K.; Jeon, S. 2D and 3D nanostructuring strategies for thermoelectric materials. Nanoscale 2019, 11, 19684-19699.
[64]
Cho, D.; Park, J.; Kim, T.; Jeon, S. Recent advances in lithographic fabrication of micro-/nanostructured polydimethylsiloxanes and their soft electronic applications. J. Semicond. 2019, 40, 111605.
[65]
Lee, K.; Yoon, H.; Ahn, C.; Park, J.; Jeon, S. Strategies to improve the photocatalytic activity of TiO2: 3D nanostructuring and heterostructuring with graphitic carbon nanomaterials. Nanoscale 2019, 11, 7025-7040.
[66]
Ahn, C.; Park, J.; Jeon, S. Recent advances in high-performance functional ceramics using 3D nanostructuring techniques. Ceramist 2019, 22, 230-242.
[67]
Moharam, M. G.; Gaylord, T. K. Rigorous coupled-wave analysis of grating diffraction—E-mode polarization and losses. J. Opt. Soc. Am. 1983, 73, 451-455.
[68]
Moharam, M. G.; Grann, E. B.; Pommet, D. A.; Gaylord, T. K. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings. J. Opt. Soc. Am. A 1995, 12, 1068-1076.
[69]
Klein, W. R. Theoretical efficiency of Bragg devices. Proc. IEEE 1966, 54, 803-804.
[70]
Sullivan, D. M. Electromagnetic Simulation Using the FDTD Method, 2nd ed.; John Wiley & Sons: Hoboken, 2013.
[71]
Maria, J.; Malyarchuk, V.; White, J.; Rogers, J. A. Experimental and computational studies of phase shift lithography with binary elastomeric masks. J. Vac. Sci. Technol. B 2006, 24, 828-835.
[72]
Pouya, C.; Stavenga, D. G.; Vukusic, P. Discovery of ordered and quasi-ordered photonic crystal structures in the scales of the beetle Eupholus magnificus. Opt. Express 2011, 19, 11355-11364.
[73]
Bietsch, A.; Michel, B. Conformal contact and pattern stability of stamps used for soft lithography. J. Appl. Phys. 2000, 88, 4310-4318.
[74]
Schmid, H.; Michel, B. Siloxane polymers for high-resolution, high-accuracy soft lithography. Macromolecules 2000, 33, 3042-3049.
[75]
Truong, T. T.; Lin, R. S.; Jeon, S.; Lee, H. H.; Maria, J.; Gaur, A.; Hua, F.; Meinel, I.; Rogers, J. A. Soft lithography using acryloxy perfluoropolyether composite stamps. Langmuir 2007, 23, 2898-2905.
[76]
Guo, L. J. Nanoimprint lithography: Methods and material requirements. Adv. Mater. 2007, 19, 495-513.
[77]
Hui, C. Y.; Jagota, A.; Lin, Y. Y.; Kramer, E. J. Constraints on microcontact printing imposed by stamp deformation. Langmuir 2002, 18, 1394-1407.
[78]
Zhang, Y.; Lo, C. W.; Taylor, J. A.; Yang, S. Replica molding of high-aspect-ratio polymeric nanopillar arrays with high fidelity. Langmuir 2006, 22, 8595-8601.
[79]
Kwon, Y. W.; Park, J.; Kim, T.; Kang, S. H.; Kim, H.; Shin, J.; Jeon, S.; Hong, S. W. Flexible near-field nanopatterning with ultrathin, conformal phase masks on nonplanar substrates for biomimetic hierarchical photonic structures. ACS Nano 2016, 10, 4609-4617.
[80]
Park, J.; Tahk, D.; Ahn, C.; Im, S. G.; Choi, S. J.; Suh, K. Y.; Jeon, S. Conformal phase masks made of polyurethane acrylate with optimized elastic modulus for 3D nanopatterning. J. Mater. Chem. C 2014, 2, 2316-2322.
[81]
Kim, P.; Suh, K. Y. Rigiflex, spontaneously wettable polymeric mold for forming reversibly bonded nanocapillaries. Langmuir 2007, 23, 4549-4553.
[82]
Ministry of Technology. Adhesion Fundamentals and Practice; Macharen and Sons Ltd: London, 1966.
[83]
Hong, S.; Park, J.; Jeon, S. G.; Kim, K.; Park, S. H.; Shin, H. S.; Kim, B.; Jeon, S.; Song, J. Y. Monolithic Bi1.5Sb0.5Te3 ternary alloys with a periodic 3D nanostructure for enhancing thermoelectric performance. J. Mater. Chem. C 2017, 5, 8974-8980.
[84]
Cho, S.; Ahn, C.; Park, J.; Jeon, S. 3D nanostructured N-doped TiO2 photocatalysts with enhanced visible absorption. Nanoscale 2018, 10, 9747-9751.
[85]
Yoon, H.; Lee, K.; Kim, H.; Park, M.; Novak, T. G.; Hyun, G.; Jeong, M. S.; Jeon, S. Highly efficient UV-visible photocatalyst from monolithic 3D titania/graphene quantum dot heterostructure linked by aminosilane. Adv. Sustain. Syst. 2019, 3, 1900084.
[86]
Cho, D.; Suh, J. M.; Nam, S. H.; Park, S. Y.; Park, M.; Lee, T. H.; Choi, K. S.; Lee, J.; Ahn, C.; Jang, H. W. Optically activated 3D thin-shell TiO2 for super-sensitive chemoresistive responses: Toward visible light activation. Adv. Sci. 2021, 8, 2001883.
[87]
Kim, K.; Park, J.; Hong, S.; Park, S. H.; Jeon, S. G.; Ahn, C.; Song, J. Y.; Jeon, S. Anomalous thermoelectricity of pure ZnO from 3D continuous ultrathin nanoshell structures. Nanoscale 2018, 10, 3046-3052.
[88]
Tiwari, A. P.; Lee, K.; Kim, K.; Kim, J.; Novak, T. G.; Jeon, S. Conformally coated nickel phosphide on 3D, ordered nanoporous nickel for highly active and durable hydrogen evolution. ACS Sustainable Chem. Eng. 2020, 8, 17116-17123.
[89]
Kim, H.; Yun, S.; Kim, K.; Kim, W.; Ryu, J.; Nam, H. G.; Han, S. M.; Jeon, S.; Hong, S. Breaking the elastic limit of piezoelectric ceramics using nanostructures: A case study using ZnO. Nano Energy 2020, 78, 105259.
[90]
Kim, K.; Tiwari, A. P.; Hyun, G.; Novak, T. G.; Jeon, S. Improving electrochemical active area of MoS2 via attached on 3D-ordered structures for hydrogen evolution reaction. Int. J. Hydrog. Energy 2019, 44, 28143-28150.
[91]
Kuk, S. K.; Ham, Y.; Gopinath, K.; Boonmongkolras, P.; Lee, Y.; Lee, Y. W.; Kondaveeti, S.; Ahn, C.; Shin, B.; Lee, J. K. et al. Continuous 3D titanium nitride nanoshell structure for solar-driven unbiased biocatalytic CO2 reduction. Adv. Energy Mater. 2019, 9, 1900029.
[92]
Hyun, G.; Cho, S. H.; Park, J.; Kim, K.; Ahn, C.; Tiwari, A. P.; Kim, I. D.; Jeon, S. 3D ordered carbon/SnO2 hybrid nanostructures for energy storage applications. Electrochim. Acta 2018, 288, 108-114.
[93]
Kim, S.; Ahn, C.; Cho, Y.; Hyun, G.; Jeon, S.; Park, J. H. Suppressing buoyant force: New avenue for long-term durability of oxygen evolution catalysts. Nano Energy 2018, 54, 184-191.
[94]
Kim, K; Tiwari, A. P.; Novak, T. G.; Jeon, S. 3D ordered nanoelectrodes for energy conversion applications: Thermoelectric, piezoelectric, and electrocatalytic applications. J. Korean Ceram. Soc., in press, .
[95]
Cho, D.; Shim, Y. S.; Jung, J. W.; Nam, S. H.; Min, S.; Lee, S. E.; Ham, Y.; Lee, K.; Park, J.; Shin, J. et al. High-contrast optical modulation from strain-induced nanogaps at 3D heterogeneous interfaces. Adv. Sci. 2020, 7, 1903708.
[96]
Ahn, C.; Kim, S. M.; Jung, J. W.; Park, J.; Kim, T.; Lee, S. E.; Jang, D.; Hong, J. W.; Han, S. M.; Jeon, S. Multifunctional polymer nanocomposites reinforced by 3D continuous ceramic nanofillers. ACS Nano 2018, 12, 9126-9133.
[97]
Araki, S.; Ishikawa, Y.; Wang, X. D. F.; Uenuma, M.; Cho, D.; Jeon, S.; Uraoka, Y. Fabrication of nanoshell-based 3D periodic structures by templating process using solution-derived ZnO. Nanoscale Res. Lett. 2017, 12, 419.
[98]
Na, Y. E.; Shin, D.; Kim, K.; Ahn, C.; Jeon, S.; Jang, D. Emergence of new density-strength scaling law in 3D hollow ceramic nanoarchitectures. Small 2018, 14, 1802239.
[99]
Bae, G.; Choi, G. M.; Ahn, C.; Kim, S. M.; Kim, W.; Choi, Y.; Park, D.; Jang, D.; Hong, J. W.; Han, S. M. et al. Flexible protective film: Ultrahard, yet flexible hybrid nanocomposite reinforced by 3D inorganic nanoshell structures. Adv. Funct. Mater., in press, .
[100]
Bae, G.; Jang, D.; Jeon, S. Scalable fabrication of high-performance thin-shell oxide nanoarchitected materials via proximity-field nanopatterning. ACS Nano, in press, .
[101]
Kim, T.; Park, J.; Sohn, J.; Cho, D.; Jeon, S. Bioinspired, highly stretchable, and conductive dry adhesives based on 1D-2D hybrid carbon nanocomposites for all-in-one ECG electrodes. ACS Nano 2016, 10, 4770-4778.
[102]
Cho, D.; Jang, J. S.; Nam, S. H.; Ko, K.; Hwang, W.; Jung, J. W.; Lee, J.; Choi, M.; Hong, J. W.; Kim, I. D. Focused electric-field polymer writing: Toward ultralarge, multistimuli-responsive membranes. ACS Nano 2020, 14, 12173-12183.
[103]
Chen, H. M.; Jing, Y.; Lee, J. H.; Liu, D.; Kim, J.; Chen, S.; Huang, K.; Shen, X.; Zheng, Q. B.; Yang, J. L. et al. Human skin-inspired integrated multidimensional sensors based on highly anisotropic structures. Mater. Horiz. 2020, 7, 2378-2389.
[104]
Jang, H. I.; Ko, S.; Park, J.; Lee, D. E.; Jeon, S.; Ahn, C. W.; Yoo, K. S.; Park, J. H. Reversible creation of nanostructures between identical or different species of materials. Appl. Phys. A 2012, 108, 41-52.
[105]
Montoya, J. C.; Chang, C. H.; Heilmann, R. K.; Schattenburg, M. L. Doppler writing and linewidth control for scanning beam interference lithography. J. Vac. Sci. Technol. B 2005, 23, 2640-2645.
[106]
Yuan, L.; Herman, P. R. Laser scanning holographic lithography for flexible 3D fabrication of multi-scale integrated nano-structures and optical biosensors. Sci. Rep. 2016, 6, 22294.
[107]
Chen, I. T.; Schappell, E.; Zhang, X. L.; Chang, C. H. Continuous roll-to-roll patterning of three-dimensional periodic nanostructures. Microsyst. Nanoeng. 2020, 6, 22.
[108]
Jeon, S.; Nam, Y. S.; Shir, D. J. L.; Rogers, J. A.; Hamza, A. Three dimensional nanoporous density graded materials formed by optical exposures through conformable phase masks. Appl. Phys. Lett. 2006, 89, 253101.
[109]
Nam, Y. S.; Jeon, S.; Shir, D. J. L.; Hamza, A.; Rogers, J. A. Thick, three-dimensional nanoporous density-graded materials formed by optical exposures of photopolymers with controlled levels of absorption. Appl. Opt. 2007, 46, 6350-6354.
[110]
Zhou, H.; Ye, Q.; Xu, J. W. Polyhedral oligomeric silsesquioxane-based hybrid materials and their applications. Mater. Chem. Front. 2017, 1, 212-230.
[111]
Rinne, J. W.; Gupta, S.; Wiltzius, P. Inverse design for phase mask lithography. Opt. Express 2008, 16, 663-670.
[112]
Rolland, J. P.; Hagberg, E. C.; Denison, G. M.; Carter, K. R.; De Simone, J. M. High-resolution soft lithography: Enabling materials for nanotechnologies. Angew. Chem., Int. Ed. 2004, 43, 5796-5799.
[113]
Ahn, J.; Ahn, J.; Park, J. 3D-ordered porous composite microparticles formed via substrate-free optical 3D lithography. Funct. Compos. Struct. 2020, 2, 045007.
[114]
Matsukawa, K.; Watanabe, M.; Hamada, T.; Nagase, T.; Naito, H. Polysilsesquioxanes for gate-insulating materials of organic thin-film transistors. Int. J. Polym. Sci. 2012, 2012, 852063.