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We propose a plasmonic atomic force microscopy (AFM) probe, which takes a part of the laser beam for monitoring cantilever deflection as the excitation light source. Photonic crystal cavities are integrated near the cantilever's free end where the laser spot locates. The transmitted light excites surface plasmon polaritons on the metal-coated tip and induces a confined hot-spot at the tip apex. Numerical simulations demonstrate that the plasmonic probe can couple a tilted, linearly polarized beam efficiently and yield a remarkable local electromagnetic enhancement with the intensity being around 21 times stronger than that of the original probe. For demonstration, we employ the plasmonic probe in electrostatic force microscopy and scanning Kelvin probe microscopy to study the impact of local light field on the photoelectric characteristics of SiO2 and Au nanoparticles. Compared with the original probe, obvious differences are observed in the electrostatic force gradients on SiO2 nanoparticles and in the surface potentials of Au nanoparticles. The plasmonic probe can enable AFM as a powerful tool for simultaneous optical, mechanical and electrical characterizations.

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Publication history
Copyright
Acknowledgements

Publication history

Received: 27 September 2020
Revised: 21 December 2020
Accepted: 23 December 2020
Published: 22 January 2021
Issue date: November 2021

Copyright

© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2021

Acknowledgements

Acknowledgements

This work was supported by the National Natural Science Foundation of China (Nos. 51675504 and 52075517). We acknowledge the USTC Center for Micro- and Nanoscale Research and Fabrication for technical support in the FIB processing.

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