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Nano Research 2020, 13(8): 2035-2043 https://doi.org/10.1007/s12274-020-2872-z
Research Article | Issue | Published: 05 August 2020

Direct laser patterning of two-dimensional lateral transition metal disulfide-oxide-disulfide heterostructures for ultrasensitive sensors

Show Author's Information Bolun Wang1,  Hao Luo1,  Xuewen Wang1,  Enze Wang1,  Yufei Sun1,  Yu-Chien Tsai2,  Jinxuan Dong3,  Peng Liu2,  Huanglong Li4,  Yong Xu3,5,  Sefaattin Tongay6,  Kaili Jiang2,3,  Shoushan Fan2,3,  Kai Liu1( )
State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing 100084, China
Department of Precision Instrument, Center for Brain Inspired Computing Research, Tsinghua University, Beijing 100084, China
RIKEN Center for Emergent Matter Science (CEMS), Wako, Saitama 351-0198, Japan
School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, AZ 85287, USA
Keywords:
sensor, niobium disulfide, two-dimensional heterostructure, niobium oxide, laser patterning
Topics:
Niobium oxideSulfur compoundsTemperatureTransition metalsTransitionmetal oxides
Cite this article:
Wang B, Luo H, Wang X, et al. Direct laser patterning of two-dimensional lateral transition metal disulfide-oxide-disulfide heterostructures for ultrasensitive sensors. Nano Research, 2020, 13(8): 2035-2043. https://doi.org/10.1007/s12274-020-2872-z
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Abstract Full text Electronic supplementary material About this article

Two-dimensional (2D) heterostructures based on the combination of transition metal dichalcogenides (TMDs) and transition metal oxides (TMOs) have aroused growing attention due to their integrated merits of both components and multiple functionalities. However, nondestructive approaches of constructing TMD-TMO heterostructures are still very limited. Here, we develop a novel type of lateral TMD-TMO heterostructure (NbS2-Nb2O5-NbS2) using a simple lithography-free, direct laser-patterning technique. The perfect contact of an ultrathin TMO channel (Nb2O5) with two metallic TMDs (NbS2) electrodes guarantee strong electrical signals in a two-terminal sensor. Distinct from sensing mechanisms in separate TMOs or TMDs, this sensor works based on the modulation of surface conduction of the ultrathin TMO (Nb2O5) channel through an adsorbed layer of water molecules. The sensor thus exhibits high selectivity and ultrahigh sensitivity for room-temperature detection of NH3 (ΔR/R = 80% at 50 ppm), superior to the reported NH3 sensors based on 2D materials, and a positive temperature coefficient of resistance as high as 15%-20%/°C. Bending-invariant performance and high reliability are also demonstrated in flexible versions of sensors. Our work provides a new strategy of lithography-free processing of novel TMD-TMO heterostructures towards high-performance sensors, showing great potential in the applications of future portable and wearable electronics.


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Abstract
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Electronic supplementary material
About this article

Direct laser patterning of two-dimensional lateral transition metal disulfide-oxide-disulfide heterostructures for ultrasensitive sensors

Show Author's information Bolun Wang1, Hao Luo1, Xuewen Wang1, Enze Wang1, Yufei Sun1, Yu-Chien Tsai2, Jinxuan Dong3, Peng Liu2, Huanglong Li4, Yong Xu3,5, Sefaattin Tongay6, Kaili Jiang2,3, Shoushan Fan2,3, Kai Liu1( )
State Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics, Tsinghua University, Beijing 100084, China
Department of Precision Instrument, Center for Brain Inspired Computing Research, Tsinghua University, Beijing 100084, China
RIKEN Center for Emergent Matter Science (CEMS), Wako, Saitama 351-0198, Japan
School for Engineering of Matter, Transport and Energy, Arizona State University, Tempe, AZ 85287, USA

Abstract

Two-dimensional (2D) heterostructures based on the combination of transition metal dichalcogenides (TMDs) and transition metal oxides (TMOs) have aroused growing attention due to their integrated merits of both components and multiple functionalities. However, nondestructive approaches of constructing TMD-TMO heterostructures are still very limited. Here, we develop a novel type of lateral TMD-TMO heterostructure (NbS2-Nb2O5-NbS2) using a simple lithography-free, direct laser-patterning technique. The perfect contact of an ultrathin TMO channel (Nb2O5) with two metallic TMDs (NbS2) electrodes guarantee strong electrical signals in a two-terminal sensor. Distinct from sensing mechanisms in separate TMOs or TMDs, this sensor works based on the modulation of surface conduction of the ultrathin TMO (Nb2O5) channel through an adsorbed layer of water molecules. The sensor thus exhibits high selectivity and ultrahigh sensitivity for room-temperature detection of NH3 (ΔR/R = 80% at 50 ppm), superior to the reported NH3 sensors based on 2D materials, and a positive temperature coefficient of resistance as high as 15%-20%/°C. Bending-invariant performance and high reliability are also demonstrated in flexible versions of sensors. Our work provides a new strategy of lithography-free processing of novel TMD-TMO heterostructures towards high-performance sensors, showing great potential in the applications of future portable and wearable electronics.

Keywords: sensor, niobium disulfide, two-dimensional heterostructure, niobium oxide, laser patterning

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Publication history
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Acknowledgements

Publication history

Received: 12 April 2020
Revised: 03 May 2020
Accepted: 10 May 2020
Published: 05 August 2020
Issue date: August 2020

Copyright

© Tsinghua University Press and Springer-Verlag GmbH Germany, part of Springer Nature 2020

Acknowledgements

We thank Prof. Yadong Li and Prof. Xiaofeng Feng for their helpful discussions. This work was financially supported by Basic Science Center Project of the National Natural Science Foundation of China (NSFC) (No. 51788104), the National Key R&D Program of China (No. 2018YFA0208400), the National Natural Science Foundation of China (Nos. 51972193 and 11774191), and Fok Ying-Tong Education Foundation (No. 161042)

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