Journal Home > Volume 9 , Issue 8
Nano Research 2016, 9(8): 2510-2519 https://doi.org/10.1007/s12274-016-1137-3
Research Article | Issue | Published: 23 June 2016

Improved conductivity and capacitance of interdigital carbon microelectrodes through integration with carbon nanotubes for micro-supercapacitors

Show Author's Information Yanjuan Yang1,  Liang He1( ),  Chunjuan Tang1,2,  Ping Hu1,  Xufeng Hong1,  Mengyu Yan1,  Yixiao Dong1,  Xiaocong Tian1,  Qiulong Wei1,  Liqiang Mai1( )
State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingWuhan University of TechnologyWuhan430070China
Department of Mathematics and PhysicsLuoyang Institute of Science and TechnologyLuoyang471023China
Keywords:
pyrolysis, carbon nanotubes, supercapacitors, photolithography, microelectromechanical system (MEMS)
Cite this article:
Yang Y, He L, Tang C, et al. Improved conductivity and capacitance of interdigital carbon microelectrodes through integration with carbon nanotubes for micro-supercapacitors. Nano Research, 2016, 9(8): 2510-2519. https://doi.org/10.1007/s12274-016-1137-3
Download citation
EndNote(RIS)
BibTeX

621

Views

24

Downloads

Citations

72

Crossref

N/A

WoS

72

Scopus

6

CSCD

Abstract Full text Electronic supplementary material About this article

In the last decade, pyrolyzed-carbon-based composites have attracted much attention for their applications in micro-supercapacitors. Although various methods have been investigated to improve the performance of pyrolyzed carbons, such as conductivity, energy storage density and cycling performance, effective methods for the integration and mass-production of pyrolyzed-carbon-based composites on a large scale are lacking. Here, we report the development of an optimized photolithographic technique for the fine micropatterning of photoresist/chitosan-coated carbon nanotube (CHIT-CNT) composite. After subsequent pyrolysis, the fabricated carbon/CHIT-CNT microelectrode-based micro-supercapacitor has a high capacitance (6.09 mF·cm–2) and energy density (4.5 mWh·cm–3) at a scan rate of 10 mV·s–1. Additionally, the micro-supercapacitor has a remarkable long-term cyclability, with 99.9% capacitance retention after 10, 000 cyclic voltammetry cycles. This design and microfabrication process allow the application of carbon microelectromechanical system (C-MEMS)-based micro-supercapacitors due to their high potential for enhancing the mechanical and electrochemical performance of micro-supercapacitors.


menu
Abstract
Full text
Outline
Electronic supplementary material
About this article

Improved conductivity and capacitance of interdigital carbon microelectrodes through integration with carbon nanotubes for micro-supercapacitors

Show Author's information Yanjuan Yang1, Liang He1( ), Chunjuan Tang1,2, Ping Hu1, Xufeng Hong1, Mengyu Yan1, Yixiao Dong1, Xiaocong Tian1, Qiulong Wei1, Liqiang Mai1( )
State Key Laboratory of Advanced Technology for Materials Synthesis and ProcessingWuhan University of TechnologyWuhan430070China
Department of Mathematics and PhysicsLuoyang Institute of Science and TechnologyLuoyang471023China

Abstract

In the last decade, pyrolyzed-carbon-based composites have attracted much attention for their applications in micro-supercapacitors. Although various methods have been investigated to improve the performance of pyrolyzed carbons, such as conductivity, energy storage density and cycling performance, effective methods for the integration and mass-production of pyrolyzed-carbon-based composites on a large scale are lacking. Here, we report the development of an optimized photolithographic technique for the fine micropatterning of photoresist/chitosan-coated carbon nanotube (CHIT-CNT) composite. After subsequent pyrolysis, the fabricated carbon/CHIT-CNT microelectrode-based micro-supercapacitor has a high capacitance (6.09 mF·cm–2) and energy density (4.5 mWh·cm–3) at a scan rate of 10 mV·s–1. Additionally, the micro-supercapacitor has a remarkable long-term cyclability, with 99.9% capacitance retention after 10, 000 cyclic voltammetry cycles. This design and microfabrication process allow the application of carbon microelectromechanical system (C-MEMS)-based micro-supercapacitors due to their high potential for enhancing the mechanical and electrochemical performance of micro-supercapacitors.

Keywords: pyrolysis, carbon nanotubes, supercapacitors, photolithography, microelectromechanical system (MEMS)

References(48)

1

Simon, P.; Gogotsi, Y. Materials for electrochemical capacitors. Nat. Mater. 2008, 7, 845–854.
DOI Google Scholar
2

Zhang, L. L.; Zhao, X. S. Carbon-based materials as supercapacitor electrodes. Chem. Soc. Rev. 2009, 38, 2520–2531.
DOI Google Scholar
3

Lin, T. Q.; Chen, I. -W.; Liu, F. X.; Yang, C. Y.; Bi, H.; Xu, F. F.; Huang, F. Q. Nitrogen-doped mesoporous carbon of extraordinary capacitance for electrochemical energy storage. Science 2015, 350, 1508–1513.
DOI Google Scholar
4

Jiang, H.; Lee, P. S.; Li, C. Z. 3D carbon based nanostructures for advanced supercapacitors. Energy Environ. Sci. 2013, 6, 41–53.
DOI Google Scholar
5

Wei, L.; Yushin, G. Nanostructured activated carbons from natural precursors for electrical double layer capacitors. Nano Energy 2012, 1, 552–565.
DOI Google Scholar
6

Wei, L.; Sevilla, M.; Fuertes, A. B.; Mokaya, R.; Yushin, G. Hydrothermal carbonization of abundant renewable natural organic chemicals for high-performance supercapacitor electrodes. Adv. Energy Mater. 2011, 1, 356–361.
DOI Google Scholar
7

Tian, X. C.; Shi, M. Z.; Xu, X.; Yan, M. Y.; Xu, L.; Minhas-Khan, A.; Han, C. H.; He, L.; Mai, L. Q. Arbitrary shape engineerable spiral micropseudocapacitors with ultrahigh energy and power densities. Adv. Mater. 2015, 27, 7476–7482.
DOI Google Scholar
8

Liu, W. W.; Lu, C. X.; Wang, X. L.; Tay, R. Y.; Tay, B. K. High-performance microsupercapacitors based on two- dimensional graphene/manganese dioxide/silver nanowire ternary hybrid film. ACS Nano 2015, 9, 1528–1542.
DOI Google Scholar
9

Beidaghi, M.; Wang, C. L. Micro-supercapacitors based on interdigital electrodes of reduced graphene oxide and carbon nanotube composites with ultrahigh power handling performance. Adv. Funct. Mater. 2012, 22, 4501–4510.
DOI Google Scholar
10

Wei, L.; Nitta, N.; Yushin, G. Lithographically patterned thin activated carbon films as a new technology platform for on-chip devices. ACS Nano 2013, 7, 6498–6506.
DOI Google Scholar
11

Jiang, W. C.; Zhai, S. L.; Qian, Q. H.; Yuan, Y.; Karahan, H. E.; Wei, L.; Goh, K.; Ng, A. K.; Wei, J.; Chen, Y. Space-confined assembly of all-carbon hybrid fibers for capacitive energy storage: Realizing a built-to-order concept for micro-supercapacitors. Energy Environ. Sci. 2016, 9, 611–622.
DOI Google Scholar
12

Beidaghi, M.; Wang, C. L. Micro-supercapacitors based on three dimensional interdigital polypyrrole/C-MEMS electrodes. Electrochim. Acta 2011, 56, 9508–9514.
DOI Google Scholar
13

Jiang, S. L.; Shi, T. L.; Liu, D.; Long, H.; Xi, S.; Wu, F. S.; Li, X. P.; Xia, Q.; Tang, Z. R. Integration of MnO2 thin film and carbon nanotubes to three-dimensional carbon microelectrodes for electrochemical microcapacitors. J. Power Sources 2014, 262, 494–500.
DOI Google Scholar
14

Hsia, B.; Kim, M. S.; Vincent, M.; Carraro, C.; Maboudian, R. Photoresist-derived porous carbon for on-chip micro- supercapacitors. Carbon 2013, 57, 395–400.
DOI Google Scholar
15

Kaempgen, M.; Chan, C. K.; Ma, J.; Cui, Y.; Gruner, G. Printable thin film supercapacitors using single-walled carbon nanotubes. Nano Lett. 2009, 9, 1872–1876.
DOI Google Scholar
16

Shen, C. W.; Wang, X. H.; Li, S. W.; Wang, J. G.; Zhang, W. F.; Kang, F. Y. A high-energy-density micro supercapacitor of asymmetric MnO2-carbon configuration by using micro- fabrication technologies. J. Power Sources 2013, 234, 302–309.
DOI Google Scholar
17

Chen, W.; Beidaghi, M.; Penmatsa, V.; Bechtold, K.; Kumari, L.; Li, W. Z.; Wang, C. L. Integration of carbon nanotubes to C-MEMS for on-chip supercapacitors. IEEE T. Nanotechnol. 2010, 9, 734–740.
DOI Google Scholar
18

Wang, H. J.; Peng, C.; Zheng, J. D.; Peng, F.; Yu, H. Design, synthesis and the electrochemical performance of MnO2/C@CNT as supercapacitor material. Mater. Res. Bull. 2013, 48, 3389–3393.
DOI Google Scholar
19

Kim, S. -K.; Park, H. S. Multiwalled carbon nanotubes coated with a thin carbon layer for use as composite electrodes in supercapacitors. RSC Adv. 2014, 4, 47827–47832.
DOI Google Scholar
20

Liu, Y. Y.; Tang, J.; Chen, X. Q.; Xin, J. H. Decoration of carbon nanotubes with chitosan. Carbon 2005, 43, 3178– 3180.
DOI Google Scholar
21

Jiang, S. L.; Shi, T. L.; Zhan, X. B.; Xi, S.; Long, H.; Gong, B.; Li, J. J.; Cheng, S. Y.; Huang, Y. Y.; Tang, Z. R. Scalable fabrication of carbon-based MEMS/NEMS and their applications: A review. J. Micromech. Microeng. 2015, 25, 113001.
DOI Google Scholar
22

Wei, L.; Sevilla, M.; Fuertes, A. B.; Mokaya, R.; Yushin, G. Polypyrrole-derived activated carbons for high-performance electrical double-layer capacitors with ionic liquid electrolyte. Adv. Funct. Mater. 2012, 22, 827–834.
DOI Google Scholar
23

Sevilla, M.; Mokaya, R. Energy storage applications of activated carbons: Supercapacitors and hydrogen storage. Energy Environ. Sci. 2014, 7, 1250–1280.
DOI Google Scholar
24

Simon, P.; Gogotsi, Y. Capacitive energy storage in nanostructured carbon-electrolyte systems. Acc. Chem. Res. 2013, 46, 1094–1103.
DOI Google Scholar
25

Béguin, F.; Presser, V.; Balducci, A.; Frackowiak, E. Carbons and electrolytes for advanced supercapacitors. Adv. Mater. 2014, 26, 2219–2251.
DOI Google Scholar
26

Futaba, D. N.; Hata, K.; Yamada, T.; Hiraoka, T.; Hayamizu, Y.; Kakudate, Y.; Tanaike, O.; Hatori, H.; Yumura, M.; Iijima, S. Shape-engineerable and highly densely packed single-walled carbon nanotubes and their application as super-capacitor electrodes. Nat. Mater. 2006, 5, 987–994.
DOI Google Scholar
27

Sivaraman, P.; Bhattacharrya, A. R.; Mishra, S. P.; Thakur, A. P.; Shashidhara, K.; Samui, A. B. Asymmetric supercapacitor containing poly(3-methyl thiophene)-multiwalled carbon nanotubes nanocomposites and activated carbon. Electrochim. Acta 2013, 94, 182–191.
DOI Google Scholar
28

Penmatsa, V.; Kawarada, H.; Wang, C. L. Fabrication of carbon nanostructures using photo-nanoimprint lithography and pyrolysis. J. Micromech. Microeng. 2012, 22, 045024.
DOI Google Scholar
29

He, L.; Toda, M.; Kawai, Y.; Miyashita, H.; Omori, M.; Hashida, T.; Berger, R.; Ono, T. Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis. Microsyst. Technol. 2014, 20, 201–208.
DOI Google Scholar
30

He, L.; Toda, M.; Kawai, Y.; Sarbi, M. F.; Omori, M.; Hashida, T.; Ono, T. Fabrication of a Si-PZT hybrid XY- microstage with CNT-carbon hinges. IEEJ Trans. Sens. Micromach. 2012, 132, 425–426.
DOI Google Scholar
31

Zhou, P.; Yang, X.; He, L.; Hao, Z. M.; Luo, W.; Xiong, B.; Xu, X.; Niu, C. J.; Yan, M. Y.; Mai, L. Q. The Young's modulus of high-aspect-ratio carbon/carbon nanotube composite microcantilevers by experimental and modeling validation. Appl. Phys. Lett. 2015, 106, 111908.
DOI Google Scholar
32

Reserbat-Plantey, A.; Schädler, K. G.; Gaudreau, L.; Navickaite, G.; Güttinger, J.; Chang, D.; Toninelli, C.; Bachtold, A.; Koppens, F. H. L. Electromechanical control of nitrogen-vacancy defect emission using graphene NEMS. Nat. Commun. 2016, 7, 10218.
DOI Google Scholar
33

Lau, C.; Cooney, M. J.; Atanassov, P. Conductive macroporous composite chitosan-carbon nanotube scaffolds. Langmuir 2008, 24, 7004–7010.
DOI Google Scholar
34

Yang X. M.; Tu, Y. F.; Li, L.; Shang, S. M.; Tao, X. -M. Well-dispersed chitosan/graphene oxide nanocomposites. ACS Appl. Mater. Interfaces 2010, 2, 1707–1713.
DOI Google Scholar
35

Lin, J. H.; He, C. Y.; Zhao, Y.; Zhang, S. S. One-step synthesis of silver nanoparticles/carbon nanotubes/chitosan film and its application in glucose biosensor. Sensor. Actuat. B 2009, 137, 768–773.
DOI Google Scholar
36

Yamamoto, G.; Suk, J. W.; An, J.; Piner, R. D.; Hashida, T.; Takagi, T.; Ruoff, R. S. The influence of Nanoscale defects on the fracture of multi-walled carbon nanotubes under tensile loading. Diam. Relat. Mater. 2010, 19, 748–751.
DOI Google Scholar
37

Wang, S.; Hsia, B.; Carraro, C.; Maboudian, R. High- performance all solid-state micro-supercapacitor based on patterned photoresist-derived porous carbon electrodes and an ionogel electrolyte. J. Mater. Chem. A 2014, 2, 7997–8002.
DOI Google Scholar
38

Huang, P. H.; Heon, M.; Pech, D.; Brunet, M.; Taberna, P. -L.; Gogotsi, Y.; Lofland, S.; Hettinger, J. D.; Simon, P. Micro-supercapacitors from carbide derived carbon (CDC) films on silicon chips. J. Power Sources 2013, 225, 240–244.
DOI Google Scholar
39

Pech, D.; Brunet, M.; Taberna, P. -L.; Simon, P.; Fabre, N.; Mesnilgrente, F.; Conédéra, V.; Durou, H. Elaboration of a microstructured inkjet-printed carbon electrochemical capacitor. J. Power Sources 2010, 195, 1266–1269.
DOI Google Scholar
40

Hsia, B.; Marschewski, J.; Wang, S.; In, J. B.; Carraro, C.; Poulikakos, D.; Grigoropoulos, C. P.; Maboudian, R. Highly flexible, all solid-state micro-supercapacitors from vertically aligned carbon nanotubes. Nanotechnology 2014, 25, 055401.
DOI Google Scholar
41

Jiang, Y. Q.; Zhou, Q.; Lin, L. Planar MEMS supercapacitor using carbon nanotube forests. In Proceedings of the IEEE 22nd International Conference on Micro Electro Mechanical Systems, Sorrento, Italy, 2009, pp 587–590.
DOI Google Scholar
42

Wu, Z. -S.; Parvez, K.; Feng, X. L.; Müllen, K. Graphene- based in-plane micro-supercapacitors with high power and energy densities. Nat. Commun. 2013, 4, 2487.
DOI Google Scholar
43

Yun, J.; Kim, D.; Lee, G.; Ha, J. S. All-solid-state flexible micro-supercapacitor arrays with patterned graphene/MWNT electrodes. Carbon 2014, 79, 156–164.
DOI Google Scholar
44

Gu, S. S.; Lou, Z.; Li, L. D.; Chen, Z. J.; Ma, X. D.; Shen, G. Z. Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications. Nano Res. 2016, 9, 424–434.
DOI Google Scholar
45

Park, B. Y.; Taherabadi, L.; Wang, C. L.; Zoval, J.; Madou, M. J. Electrical properties and shrinkage of carbonized photoresist films and the implications for carbon microelectromechanical systems devices in conductive media. J. Electrochem. Soc. 2005, 152, J136–J143.
DOI Google Scholar
46

Cai, Z. Y.; Xu, L.; Yan, M. Y.; Han, C. H.; He, L.; Hercule, K. M.; Niu, C. J.; Yuan, Z. F.; Xu, W. W.; Qu, L. B. et al. Manganese oxide/carbon yolk–shell nanorod anodes for high capacity lithium batteries. Nano Lett. 2015, 15, 738–744.
DOI Google Scholar
47

An, Z. L.; He, L.; Toda, M.; Yamamoto, G.; Hashida, T.; Ono, T. Microstructuring of carbon nanotubes-nickel nanocomposite. Nanotechnology 2015, 26, 195601.
DOI Google Scholar
48

Xu, G. H.; Zheng, C.; Zhang, Q.; Huang, J. Q.; Zhao, M. Q.; Nie, J. Q.; Wang, X. H.; Wei, F. Binder-free activated carbon/ carbon nanotube paper electrodes for use in supercapacitors. Nano Res. 2011, 4, 870–881.
DOI Google Scholar
File
nr-9-8-2510_ESM.pdf (939.2 KB)
Publication history
Copyright
Acknowledgements

Publication history

Received: 17 February 2016
Revised: 03 May 2016
Accepted: 06 May 2016
Published: 23 June 2016
Issue date: August 2016

Copyright

© Tsinghua University Press and Springer‐Verlag Berlin Heidelberg 2016

Acknowledgements

Acknowledgements

This work was supported by the National Basic Research Program of China (No. 2013CB934103), the National Natural Science Fund for Distinguished Young Scholars (No. 51425204), the National Natural Science Foundation of China (Nos. 51521001 and 51502227), the China Postdoctoral Science Foundation (No. 2015T80845), and the Fundamental Research Funds for the Central Universities (WUT: Nos. 2014-Ⅳ-062, 2014-Ⅳ-147, 2014-YB-002, and 2016Ⅲ005).

Return