Friction

ISSN 2223-7690 e-ISSN 2223-7704 CN 10-1237/TH
Editor-in-Chief: Jianbin Luo
Open Access
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Keyword: planarization mechanism
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Open Access Review Article
Chemical mechanical polishing: Theory and experiment
https://doi.org/10.1007/s40544-013-0035-x
Published: 12 December 2013
2013, 1 (4): 306-326
Downloads: 234 | Views: 1885 | PDF (2.1 MB)
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