Friction

ISSN 2223-7690 e-ISSN 2223-7704 CN 10-1237/TH

Editor-in-Chief: Jianbin Luo

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Keyword: chemical mechanical polishing (CMP)

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Open Access Research Article

Exploring the role of --NH₂ functional groups of ethylenediamine in chemical mechanical polishing of GCr15 bearing steel

Hanqiang WU, Liang JIANG, Xia ZHONG, [...], Jinwei LIU, Na QIN, Linmao QIAN << Fewer

https://doi.org/10.1007/s40544-020-0460-6

Published: 23 November 2020

2021, 9 (6): 1673-1687

Downloads: 40 | Views: 722 |

PDF (3.7 MB)

Open Access Research Article

Novel three-body nano-abrasive wear mechanism

Ruling CHEN, Shaoxian LI

https://doi.org/10.1007/s40544-020-0481-1

Published: 27 February 2021

2022, 10 (5): 677-687

Downloads: 21 | Views: 676 |

PDF (2.6 MB)

Open Access Research Article

Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments

Lei XU, Kihong PARK, Hong LEI, [...], Pengzhan LIU, Eungchul KIM, Yeongkwang CHO, Taesung KIM, Chuandong CHEN << Fewer

https://doi.org/10.1007/s40544-022-0668-8

Published: 25 March 2023

2023, 11 (9): 1624-1640

Downloads: 13 | Views: 348 |

PDF (4.9 MB)

Open Access Research Article

Atomistic understanding of rough surface on the interfacial friction behavior during the chemical mechanical polishing process of diamond

Song YUAN, Xiaoguang GUO, Hao WANG, [...], Renke KANG, Shang GAO << Fewer

https://doi.org/10.1007/s40544-023-0760-8

Published: 04 July 2023

2024, 12 (6): 1119-1132

Downloads: 7 | Views: 46 |

PDF (3.4 MB)

Open Access Review Article

Chemical mechanical polishing: Theory and experiment

Dewen ZHAO, Xinchun LU

https://doi.org/10.1007/s40544-013-0035-x

Published: 12 December 2013

2013, 1 (4): 306-326

Downloads: 238 | Views: 1939 |

PDF (2.1 MB)

Open Access Research Article

Mechanical model of nanoparticles for material removal in chemical mechanical polishing process

Hao CHEN, Dan GUO, Guoxin XIE, Guoshun PAN

https://doi.org/10.1007/s40544-016-0112-z

Published: 15 June 2016

2016, 4 (2): 153-164

Downloads: 42 | Views: 589 |

PDF (1.8 MB)

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