@article{Fan2026, 
author = {Xuhao Fan and Shih-Chi Chen and Wei Xiong},
title = {Metalens-based 3D nanolithography breaks the throughput barrier},
year = {2026},
journal = {International Journal of Extreme Manufacturing},
volume = {8},
number = {4},
url = {https://www.sciopen.com/article/10.1088/2631-7990/ae614a},
doi = {10.1088/2631-7990/ae614a},
abstract = {}
}