@article{Shin2025, 
author = {Yu-Bin Shin and Su Been Ham and Ha-Neul Kim and Mi-Ju Kim and Jae-Woong Ko and Jae-Wook Lee and Young-Jo Park and Jung-Hyung Kim and Hyo-Chang Lee and Young Hwa Jung and Jung Woo Lee and Ho Jin Ma},
title = {Novel transparent high-entropy sesquioxide ceramics with high physicochemical plasma etching resistance},
year = {2025},
journal = {Journal of Advanced Ceramics},
volume = {14},
number = {1},
pages = {9221013},
keywords = {high-entropy ceramics, plasma etching resistance, transparent ceramics, sintering, semiconductor manufacturing},
url = {https://www.sciopen.com/article/10.26599/JAC.2024.9221013},
doi = {10.26599/JAC.2024.9221013},
abstract = {High-entropy ceramics exhibit novel intrinsic properties. Hence, they have been explored for a wide range of applications ranging from thermal insulation and energy storage to advanced optical components. Recently, the semiconductor industry has faced a demand for higher-performance chips, necessitating higher aspect ratios in wafer fabrication and further miniaturization of linewidths. Therefore, novel materials with high plasma etching resistance and minimal contaminant generation are needed. The plasma-etching resistance displayed by high-entropy ceramics can be an innovative solution to this emerging challenge. In this study, we successfully fabricated single-phase high-entropy sesquioxide ceramics with high optical transparency, dense microstructure, and minimal residual pores. A structural analysis of the fabricated samples revealed a single-phase structure with excellent phase homogeneity. An evaluation of the plasma-etching resistance of high-entropy ceramics revealed for the first time a low etching rate of 8 nm/h compared with that of conventional plasma-resistant materials. These comprehensive characterizations of high-entropy ceramics indicate that they are promising candidates for significantly improving the production yield of semiconductors and for a wide range of potential applications, such as next-generation active optical ceramics.}
}