@article{SU2024, 
author = {Feifan SU and Zhaohua YANG},
title = {MICROFABRICATION METHODS FOR REALIZING SUPERCONDUCTING QUBIT CHIPS},
year = {2024},
journal = {Physics and Engineering},
volume = {34},
number = {2},
pages = {10-18},
keywords = {superconducting qubit, Josephson junction, air bridge},
url = {https://www.sciopen.com/article/10.26599/PHYS.2024.9320202},
doi = {10.26599/PHYS.2024.9320202},
abstract = {In recent years, with the high attention of various technological powers and giants, superconducting quantum computing technology has developed rapidly. In less than 10 years, the decoherence time of a single superconducting qubit has increased by 5 orders of magnitude, from nanoseconds to hundreds of microseconds, and is expected to increase to millisecond or even second levels. The preparation of superconducting qubit chips is the foundation for achieving superconducting quantum computing. As the sixth article in the “Introduction to Physical Frontiers—Superconducting Quantum Computing” series, this article systematically elaborates on the micro-fabrication methods for preparing superconducting qubits and co-auxiliary device chips, and looks forward to the development trend of fabrication methods. Through this article, the aim is to help university physics teachers, senior undergraduate and graduate students, as well as readers with a background in science and engineering who are interested in superconducting quantum computing, systematically understand the micro-fabrication methods and processes for implementing superconducting qubit chips, and gain a comprehensive and practical understanding of superconducting quantum computing technology.}
}