TY  - JOUR
AU  - Wang, Xinwei
AU  - Chen, Rong
AU  - Sun, Shuhui
PY  - 2023
TI  - Material manufacturing from atomic layer
JO  - International Journal of Extreme Manufacturing
SN  - 2631-8644
SP  - 043001
VL  - 5
IS  - 4
AB  - Atomic scale engineering of materials and interfaces has become increasingly important in material manufacturing. Atomic layer deposition (ALD) is a technology that can offer many unique properties to achieve atomic-scale material manufacturing controllability. Herein, we discuss this ALD technology for its applications, attributes, technology status and challenges. We envision that the ALD technology will continue making significant contributions to various industries and technologies in the coming years.
UR  - https://doi.org/10.1088/2631-7990/acf3b8
DO  - 10.1088/2631-7990/acf3b8