TY  - JOUR
AU  - Hong, Xufeng
AU  - He, Liang
AU  - Ma, Xinyu
AU  - Yang, Wei
AU  - Chen, Yiming
AU  - Zhang, Lei
AU  - Yan, Haowu
AU  - Li, Zhaohuai
AU  - Mai, Liqiang
PY  - 2017
TI  - Microstructuring of carbon/tin quantum dots via a novel photolithography and pyrolysis-reduction process
JO  - Nano Research
SN  - 1998-0124
SP  - 3743
EP  - 3753
VL  - 10
IS  - 11
AB  - A novel microfabrication process based on optimized photolithography combined with pyrolysis-reduction is proposed to fabricate interdigital porous carbon/tin quantum dots (C/Sn QDs) microelectrodes. C/Sn QDs active microelectrodes are also employed as current collectors of a micro-supercapacitor (MSC). A uniform dispersion of Sn QDs (diameter of ~3 nm) in the carbon matrix is achieved using our facile and controllable microfabrication process. The as-fabricated C/Sn QDs MSC obtained by carbonization at 900 ℃ exhibits a higher areal specific capacitance (5.79 mF·cm-2) than that of the pyrolyzed carbon-based MSC (1.67 mF·cm-2) and desirable cycling stability (93.3% capacitance retention after 5, 000 cyclic voltammetry cycles). This novel microfabrication process is fully compatible with micromachining technologies, showing great potential for large-scale fine micropatterning of carbon-based composites for applications in micro/nano devices.
UR  - https://doi.org/10.1007/s12274-017-1587-2
DO  - 10.1007/s12274-017-1587-2