@article{Zhou2008, 
author = {Weiwei Zhou and Christopher Rutherglen and Peter J. Burke},
title = {Wafer Scale Synthesis of Dense Aligned Arrays of Single-Walled Carbon Nanotubes},
year = {2008},
journal = {Nano Research},
volume = {1},
number = {2},
pages = {158-165},
keywords = {Single-walled carbon nanotubes (SWNTs), chemical vapor deposition (CVD), photolithography, microcontact printing (μCP)},
url = {https://www.sciopen.com/article/10.1007/s12274-008-8012-9},
doi = {10.1007/s12274-008-8012-9},
abstract = {Here we present an easy one-step approach to pattern uniform catalyst lines for the growth of dense, aligned parallel arrays of single-walled carbon nanotubes (SWNTs) on quartz wafers by using photolithography or polydimethylsiloxane (PDMS) stamp microcontact printing (μCP). By directly doping an FeCl3/methanol solution into Shipley 1827 photoresist or polyvinylpyrrolidone (PVP), various catalyst lines can be well-patterned on a wafer scale. In addition, during the chemical vapor deposition (CVD) growth of SWNTs the polymer layers play a very important role in the formation of mono-dispersed nanoparticles. This universal and efficient method for the patterning growth of SWNTs arrays on a surface is compatible with the micro-electronics industry, thus enabling of the fabrication highly integrated circuits of SWNTs.}
}