@article{Vitry2015, 
author = {Pauline Vitry and Eric Bourillot and Cédric Plassard and Yvon Lacroute and Eric Calkins and Laurene Tetard and Eric Lesniewska},
title = {Mode-synthesizing atomic force microscopy for 3D reconstruction of embedded low-density dielectric nanostructures},
year = {2015},
journal = {Nano Research},
volume = {8},
number = {7},
pages = {2199-2205},
keywords = {nanoscale subsurface imaging, atomic force microscopy, 3D reconstruction, nanoscale tomography, acoustic microscopy, dielectric},
url = {https://www.sciopen.com/article/10.1007/s12274-015-0728-8},
doi = {10.1007/s12274-015-0728-8},
abstract = {Challenges in nanoscale characterization call for non-invasive, yet sensitive subsurface characterization of low-density materials such as polymers. In this work, we present new evidence that mode-synthesizing atomic force microscopy can be used to detect minute changes in low-density materials, such as those engendered in electro-sensitive polymers during electron beam lithography, surpassing all common nanoscale mechanical techniques.Moreover, we propose 3D reconstruction of the exposed polymer regions using successive high-resolution frames acquired at incremental depths inside the sample. In addition, the results clearly show the influence of increasing dwell time on the depth profile of the nano-sized exposed regions. Hence, the simple approach described here can be used for achieving sensitive nanoscale tomography of soft materials with promising applications in material sciences and biology.}
}