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TiO2 thin films were prepared on Pt/Ti/SiO2/Si substrate by laser chemical vapor deposition (LCVD) method. The effects of laser power (PL) and total pressure (ptot) on the microstructure of TiO2 thin films were investigated. The deposition temperature (Tdep) was mainly affected by PL, increasing with PL increasing. The single-phase rutile TiO2 thin films with different morphologies were obtained. The morphologies of TiO2 thin films were classified into three typical types, including the powdery, Wulff-shaped and granular microstructures. ptot and Tdep were the two critical factors that could be effectively used for controlling the morphology of the films.


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Preparation of rutile TiO2 thin films by laser chemical vapor deposition method

Show Author's information Dongyun GUOa,b,*( )Akihiko ITObTakashi GOTObRong TUbChuanbin WANGaQiang SHENaLianmeng ZHANGa
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, and School of Materials Science and Engineering, Wuhan University of Technology, Wuhan 430070, China
Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan

Abstract

TiO2 thin films were prepared on Pt/Ti/SiO2/Si substrate by laser chemical vapor deposition (LCVD) method. The effects of laser power (PL) and total pressure (ptot) on the microstructure of TiO2 thin films were investigated. The deposition temperature (Tdep) was mainly affected by PL, increasing with PL increasing. The single-phase rutile TiO2 thin films with different morphologies were obtained. The morphologies of TiO2 thin films were classified into three typical types, including the powdery, Wulff-shaped and granular microstructures. ptot and Tdep were the two critical factors that could be effectively used for controlling the morphology of the films.

Keywords:

rutile TiO2 thin film, laser chemical vapor deposition (LCVD), laser power, total pressure, microstructure
Received: 13 January 2013 Revised: 16 March 2013 Accepted: 18 March 2013 Published: 04 June 2013 Issue date: June 2013
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Publication history
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Publication history

Received: 13 January 2013
Revised: 16 March 2013
Accepted: 18 March 2013
Published: 04 June 2013
Issue date: June 2013

Copyright

© The author(s) 2013

Acknowledgements

This work was supported in part by the Global COE Program of the Materials Integration, Tohoku University, and the International Science and Technology Cooperation Program of China (Grant No. 2009DFB50470). This work was also supported in part by the International Science and Technology Cooperation Project of Hubei Province (Grant No. 2010BFA017) and the 111 Project of China (Grant No. B13035).

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