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Polydimethylsiloxane (PDMS) is an excellent material for investigating the mechanism of triboelectricity as it can easily be used to construct various microstructures. In this study, micro-capacitors (MCs) and variable micro- capacitors (VMCs) were embedded in PDMS by filling PDMS with silver nanoparticles (NPs) and constructing an internal cellular structure. The output performance of the triboelectric nanogenerators (TENGs) based on MCs@PDMS and VMCs@PDMS films was systematically investigated, with variation of the filling content of silver NPs and the pore ratio and size. The microstructure, permittivity, dielectric loss, and capacitance of the VMCs@PDMS films were well characterized. The output current of the TENG based on the VMCs@PDMS film was respectively 4.0 and 1.6 times higher than that of the TENGs based on the pure PDMS film and MCs@PDMS film, and the output power density of the former reached 6 W·m–2. This study sheds light on the physical nature of conductive nanoparticle fillings and cellular structures in dielectric triboelectric polymers.
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